Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665481 | Substrate processing apparatus and substrate processing method for discharge of processing liquid from nozzle | Hiroshi Sano | 2020-05-26 |
| 10651064 | Substrate treatment device and substrate treatment method | Hideji NAOHARA, Yuji Okita, Tatsuya MASUI | 2020-05-12 |
| 10580163 | Displacement detecting apparatus, displacement detecting method and substrate processing apparatus | Kazuhiro Kitamura | 2020-03-03 |