Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640865 | Substrate processing apparatus and method for manufacturing semiconductor device using the same | Joon-Myoung Lee, Yong-Sung Park, Whan-Kyun Kim, Se-Chung Oh | 2020-05-05 |