Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10601346 | Electrostatic chuck and electrostatic adsorption apparatus | Min Ho BAE, Byung Moo Kim, Yun Soo Kim | 2020-03-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10601346 | Electrostatic chuck and electrostatic adsorption apparatus | Min Ho BAE, Byung Moo Kim, Yun Soo Kim | 2020-03-24 |