Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871396 | Optical emission spectroscopy calibration device and system including the same | Jongsu Kim, Younghwan Kim, Junbum Park, Youngjoo Lee | 2020-12-22 |
| 10732129 | Apparatus for and method of performing inspection and metrology process | Kwang Soo Kim, Youngkyu Park, Byeonghwan Jeon | 2020-08-04 |