Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10808142 | Method of preparing graphene quantum dot, hardmask composition including the graphene quantum dot obtained by the method, method of forming patterns using the hardmask composition, and hardmask formed from the hardmask composition | Sangwon Kim, Minsu SEOL, Hyeonjin Shin, Dongwook LEE, Yunseong LEE +1 more | 2020-10-20 |
| 10777412 | Hardmask composition, method of preparing the same, and method of forming patterned layer by using the hardmask composition | Dongwook LEE, Sangwon Kim, Minsu SEOL, Seongjun Park, Hyeonjin Shin +2 more | 2020-09-15 |
| 10551735 | Pellicle composition for photomask, pellicle for photomask formed from the pellicle composition, method of forming the pellicle, reticle including the pellicle, and exposure apparatus for lithography including the reticle | Hyeonjin Shin, Sangwon Kim, Seongjun Park, Minsu SEOL, Dongwook LEE +2 more | 2020-02-04 |