Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635006 | Chuck-driving device and substrate-processing apparatus | Jung-Jae Kim, Sang Hyun Park, Ono Kazuya, Si Woong WOO | 2020-04-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10635006 | Chuck-driving device and substrate-processing apparatus | Jung-Jae Kim, Sang Hyun Park, Ono Kazuya, Si Woong WOO | 2020-04-28 |