Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10719008 | Phase-shift mask for extreme ultraviolet lithography | Hwanseok Seo, Seongsue Kim, Taehoon Lee | 2020-07-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10719008 | Phase-shift mask for extreme ultraviolet lithography | Hwanseok Seo, Seongsue Kim, Taehoon Lee | 2020-07-21 |