Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607820 | Monitoring units, plasma treatment devices including the same, and methods of fabricating semiconductor devices using the same | Jaehyun Lee | 2020-03-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607820 | Monitoring units, plasma treatment devices including the same, and methods of fabricating semiconductor devices using the same | Jaehyun Lee | 2020-03-31 |