Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10580617 | Method and apparatus for plasma etching | Kijong Park, Yongsun Ko, Kyunghyun Kim, Taeheon Kim, Jae-Jin Shin | 2020-03-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10580617 | Method and apparatus for plasma etching | Kijong Park, Yongsun Ko, Kyunghyun Kim, Taeheon Kim, Jae-Jin Shin | 2020-03-03 |