Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818534 | Substrate processing apparatus arranged in process chamber and operating method thereof | Ki Bum Kim, Seung Youb SA, Ram WOO, Myung-jin Lee, Seung Dae CHOI +1 more | 2020-10-27 |