Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790168 | Plasma treatment apparatus and method of fabricating semiconductor device using the same | Seung Bo Shim, Hyuk-Jin Kim, Sun Taek Lim, Jeon Il Lee, Sung-Il Cho | 2020-09-29 |