Issued Patents 2020
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10539868 | Pellicle for photomask, reticle including the same, and exposure apparatus for lithography | Hyunjae Song, Seongjun Park, Keunwook Shin, Changseok LEE | 2020-01-21 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10539868 | Pellicle for photomask, reticle including the same, and exposure apparatus for lithography | Hyunjae Song, Seongjun Park, Keunwook Shin, Changseok LEE | 2020-01-21 |