Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685844 | Hardmask composition, method of forming pattern by using the hardmask composition, and hardmask formed using the hardmask composition | Sangwon Kim, Changsik SONG, Dongcheol Jeong, Minsu SEOL, Hyeonjin Shin +3 more | 2020-06-16 |
| 10600801 | Three-dimensional semiconductor memory devices | Changhyun Lee, Byoungkeun Son | 2020-03-24 |