Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877243 | F-theta lens having diffractive optical element and optical system including the F-theta lens | Emil Aslanov, Alexander Voronov | 2020-12-29 |
| 10620136 | Patterning apparatus and operating method thereof | Alexander Voronov, Ku-Hyun Kang | 2020-04-14 |
| 10557756 | Shearing interferometer using two opposing shearing plates for laser | Emil Aslanov, Alexander Voronov | 2020-02-11 |