Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748821 | Method and system for measuring pattern placement error on a wafer | — | 2020-08-18 |
| 10643998 | Semiconductor device having first and second fin-type patterns and method of fabricating the same | Myoung-ho Kang, Jeong Lim Kim, Jae-Myoung Lee, Heung Suk Oh, Yeon Hwa Lim +2 more | 2020-05-05 |
| 10566207 | Semiconductor manufacturing methods for patterning line patterns to have reduced length variation | Kyung-yub Jeon, Seul Gi HAN | 2020-02-18 |