Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10627206 | Sensor module for detecting a process environment in semiconductor equipment, a semiconductor manufacturing apparatus, and a method of manufacturing a semiconductor device | Young Ho Hwang, Sang-Yoon Soh, Dae Hee Lee, Dae Sung Jung, Jong-min Song | 2020-04-21 |