Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818493 | Silicon-based hardmask | Paul J. LaBeaume, Shintaro Yamada, Cecilia W. Kiarie, Li Cui, Bhooshan Popere | 2020-10-27 |
| 10790146 | Aromatic resins for underlayers | Shintaro Yamada, Li Cui, Christopher Gilmore, Joshua Kaitz, Sheng Liu +1 more | 2020-09-29 |