Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875146 | Debris-removal groove for CMP polishing pad | Lee Melbourne Cook, Yuhua Tong, Joseph So, Patricia Connell | 2020-12-29 |
| 10857647 | High-rate CMP polishing method | John Nguyen, Tony Quan Tran, Jeffrey Robert Stack | 2020-12-08 |
| 10857648 | Trapezoidal CMP groove pattern | John Nguyen, Tony Quan Tran, Jeffrey Robert Stack | 2020-12-08 |
| 10861702 | Controlled residence CMP polishing method | John Nguyen, Tony Quan Tran, Jeffrey Robert Stack | 2020-12-08 |
| 10777418 | Biased pulse CMP groove pattern | John Nguyen, Tony Quan Tran, Jeffrey Robert Stack | 2020-09-15 |
| 10586708 | Uniform CMP polishing method | John Nguyen, Tony Quan Tran, Jeffrey Robert Stack | 2020-03-10 |
| 10569383 | Flanged optical endpoint detection windows and CMP polishing pads containing them | Stephen G. Pisklak | 2020-02-25 |