Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866407 | Micromechanical component and method for producing a micromechanical component | Joerg Muchow, Corinna Koepernik, Helmut Grutzeck, Rainer Straub, Stefan Mark +1 more | 2020-12-15 |
| 10795149 | Micromirror device having a mechanical stop | Helmut Grutzeck, Peter Sudy, Andreas Finn | 2020-10-06 |