Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10767785 | Pneumatically-actuated valve | Kohei Taya, Hatsuo Mori, Tomoharu Oda | 2020-09-08 |
| 10761422 | Processing fluid supply device, substrate processing device, processing fluid supply method, substrate processing method, processing fluid processing device, and processing fluid processing method | Masahiro Miyagi, Hiroyuki Araki, Tomokatsu Sato, Nobuo Kawase | 2020-09-01 |
| 10543781 | Light-emitting device | — | 2020-01-28 |