Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10685844 | Hardmask composition, method of forming pattern by using the hardmask composition, and hardmask formed using the hardmask composition | Sangwon Kim, Changsik SONG, Dongcheol Jeong, Minsu SEOL, Hyeonjin Shin +3 more | 2020-06-16 |