Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10559501 | Self-aligned quadruple patterning process for Fin pitch below 20nm | Stanley Seungchul Song, Da Yang, Kern Rim, Choh Fei Yeap | 2020-02-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10559501 | Self-aligned quadruple patterning process for Fin pitch below 20nm | Stanley Seungchul Song, Da Yang, Kern Rim, Choh Fei Yeap | 2020-02-11 |