Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10739685 | Process control method for lithographically processed semiconductor devices | Stefan Buhl, Wan Soo Kim | 2020-08-11 |
| 10739688 | Method and apparatus for fabricating wafer by calculating process correction parameters | — | 2020-08-11 |
| 10699971 | Method for processing of a further layer on a semiconductor wafer | Martin Roessiger, Stefan Buhl | 2020-06-30 |