Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10619241 | ALD method and apparatus | Juhana Kostamo, Wei Li, Tero Pilvi | 2020-04-14 |
| 10597778 | ALD method and apparatus including a photon source | — | 2020-03-24 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10619241 | ALD method and apparatus | Juhana Kostamo, Wei Li, Tero Pilvi | 2020-04-14 |
| 10597778 | ALD method and apparatus including a photon source | — | 2020-03-24 |