Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796932 | Plasma processing apparatus | — | 2020-10-06 |
| 10734203 | Plasma processing apparatus and plasma processing method | Motoko Hara | 2020-08-04 |
| 10672593 | Plasma processing apparatus and plasma processing method | Motoko Hara | 2020-06-02 |