Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10807207 | Methods and supports for holding substrates | — | 2020-10-20 |
| 10636687 | Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber | Wolfgang BUSCHBECK | 2020-04-28 |