Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727393 | Stack actuators array and deformable mirrors by utilizing wafer dicing, conductor refilling, and hybrid integrating and assembly techniques | — | 2020-07-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727393 | Stack actuators array and deformable mirrors by utilizing wafer dicing, conductor refilling, and hybrid integrating and assembly techniques | — | 2020-07-28 |