Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796882 | Charged particle beam writing apparatus and charged particle beam writing method | Hideo Inoue | 2020-10-06 |
| 10784080 | Multiple charged particle beam writing apparatus, and multiple charged particle beam writing method | Hideo Inoue | 2020-09-22 |