OI

Osamu Iizuka

NT Nuflare Technology: 2 patents #13 of 87Top 15%
Overall (2020): #134,797 of 565,922Top 25%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10867774 Multi charged particle beam writing apparatus and multi charged particle beam writing method — 2020-12-15
10636616 Aperture array alignment method and multi charged particle beam writing apparatus — 2020-04-28