Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10585348 | Pellicle, pellicle production method and exposure method using pellicle | Kazuo Kohmura, Daiki Taneichi, Takashi Kozeki, Yosuke Ono, Hisako ISHIKAWA +3 more | 2020-03-10 |