Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811218 | Tilting parameters calculating device, sample stage, charged particle beam device, and program | Takashige MORI, Takafumi Amino, Naoki Maruyama, Akira Taniyama, Shunsuke Taniguchi | 2020-10-20 |