Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10697805 | Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device | — | 2020-06-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10697805 | Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device | — | 2020-06-30 |