Issued Patents 2020
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852639 | Exposure apparatus and exposure method, and device manufacturing method | — | 2020-12-01 |
| 10788760 | Movable body apparatus, exposure apparatus, and device manufacturing method | — | 2020-09-29 |
| 10775708 | Substrate processing system and substrate processing method, and device manufacturing method | — | 2020-09-15 |
| 10698326 | Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method | — | 2020-06-30 |
| 10684562 | Measurement device, lithography system and exposure apparatus, and device manufacturing method | — | 2020-06-16 |
| 10678152 | Layout method, mark detection method, exposure method, measurement device, exposure apparatus, and device manufacturing method | — | 2020-06-09 |
| 10658157 | Exposure apparatus and exposure method, lithography method, and device manufacturing method | — | 2020-05-19 |
| 10593514 | Charged particle beam irradiation apparatus and device manufacturing method | — | 2020-03-17 |
| 10545407 | Exposure method, exposure apparatus, and device manufacturing method | — | 2020-01-28 |
| 10527943 | Exposure method, exposure apparatus, and device manufacturing method | — | 2020-01-07 |
| 10527944 | Exposure method, exposure apparatus, and device manufacturing method | — | 2020-01-07 |