Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10831106 | Light source apparatus, optical apparatus, exposure apparatus, device manufacturing method, illuminating method, exposure method, and method for manufacturing optical apparatus | Hideki Komatsuda | 2020-11-10 |
| 10599042 | Reflective image-forming optical system, exposure apparatus, and device manufacturing method | — | 2020-03-24 |