Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10691027 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2020-06-23 |
| 10591827 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2020-03-17 |
| 10541160 | Substrate case and substrate accommodation apparatus | Hideo Mizutani, Toru Kawaguchi, Takashi MASUKAWA | 2020-01-21 |
| 10527945 | Substrate processing apparatus, processing apparatus, and method for manufacturing device | Masaki Kato | 2020-01-07 |