Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571340 | Method and device for measuring wavefront using diffraction grating, and exposure method and device | Katsura Otaki, Katsumi Sugisaki | 2020-02-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571340 | Method and device for measuring wavefront using diffraction grating, and exposure method and device | Katsura Otaki, Katsumi Sugisaki | 2020-02-25 |