Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578973 | Illumination optical assembly, exposure apparatus, and device manufacturing method | Hirohisa Tanaka, Shinichi Nakajima | 2020-03-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10578973 | Illumination optical assembly, exposure apparatus, and device manufacturing method | Hirohisa Tanaka, Shinichi Nakajima | 2020-03-03 |