Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777441 | Measurement system, substrate processing system, and device manufacturing method | Tomonori Dosho | 2020-09-15 |
| 10586728 | Suction device, carry-in method, carrier system and exposure apparatus, and device manufacturing method | Taisuke Ibe | 2020-03-10 |