Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871789 | Regulator | — | 2020-12-22 |
| 10643825 | Particle generation preventing method and vacuum apparatus | Takashi Tetsuka, Hiroshi Nagaike, Masatomo KITA, Chihiro Sato | 2020-05-05 |