Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861680 | Wafer support | Daiki Maeda | 2020-12-08 |
| 10566218 | Ceramic heater | Hiroshi Takebayashi | 2020-02-18 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861680 | Wafer support | Daiki Maeda | 2020-12-08 |
| 10566218 | Ceramic heater | Hiroshi Takebayashi | 2020-02-18 |