Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741363 | Extremum seeking control apparatus and method for automatic frequency tuning for RF impedance matching | Aaron Michael Burry, Aaron T. Radomski, Aung Toe | 2020-08-11 |
| 10607821 | Sputtering system and method including an arc detection | David C. Halstead, Michael R. Gilbert | 2020-03-31 |
| 10546724 | Pulsed, bidirectional radio frequency source/load | Aaron T. Radomski, Ky Thoai Luu, Larry J. Fisk, II, Ross REINHARDT, Matthew G. Harrington +2 more | 2020-01-28 |