Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787744 | Enhancement of thermal atomic layer etching | Steven M. George, Nicholas Johnson, Amy Elizabeth Marquardt, Younghee Lee, David Zywotko +1 more | 2020-09-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10787744 | Enhancement of thermal atomic layer etching | Steven M. George, Nicholas Johnson, Amy Elizabeth Marquardt, Younghee Lee, David Zywotko +1 more | 2020-09-29 |