Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10752992 | Atomic layer deposition method of metal-containing thin film | Shintaro Higashi | 2020-08-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10752992 | Atomic layer deposition method of metal-containing thin film | Shintaro Higashi | 2020-08-25 |