Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607851 | Vapor-etch cyclic process | Andrew Li, Prashant Raghu, Sanjeev Sapra, Rita J. Klein, Sanh D. Tang | 2020-03-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607851 | Vapor-etch cyclic process | Andrew Li, Prashant Raghu, Sanjeev Sapra, Rita J. Klein, Sanh D. Tang | 2020-03-31 |