Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607851 | Vapor-etch cyclic process | Andrew Li, Sanjeev Sapra, Rita J. Klein, Sanh D. Tang, Sourabh Dhir | 2020-03-31 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607851 | Vapor-etch cyclic process | Andrew Li, Sanjeev Sapra, Rita J. Klein, Sanh D. Tang, Sourabh Dhir | 2020-03-31 |