Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847376 | In-situ deposition and etch process and apparatus for precision patterning of semiconductor devices | Syo Fukata, Naoto Umehara, Sung-Tae Lee | 2020-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847376 | In-situ deposition and etch process and apparatus for precision patterning of semiconductor devices | Syo Fukata, Naoto Umehara, Sung-Tae Lee | 2020-11-24 |