Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10796948 | Pattern forming method and imprint apparatus | Tetsuro Nakasugi, Kazuhiro Takahata | 2020-10-06 |
| 10725374 | Template substrate, method of manufacturing template substrate, and method of manufacturing semiconductor device | — | 2020-07-28 |