Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10732501 | Method and device for permanently repairing defects of absent material of a photolithographic mask | Jens Oster, Kinga Kornilov, Tristan Bret, Thorsten Hofmann | 2020-08-04 |