Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818503 | Method of etching at low temperature and plasma etching apparatus | Cheonkyu Lee, Moonseok Kim, Iksu Byun, Seongha JEONG, Dongseok Han | 2020-10-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818503 | Method of etching at low temperature and plasma etching apparatus | Cheonkyu Lee, Moonseok Kim, Iksu Byun, Seongha JEONG, Dongseok Han | 2020-10-27 |