Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801967 | Mask inspection apparatus, switching method, and mask inspection method | Tetsuya Sendoda, Takayuki Ishida | 2020-10-13 |
| 10706527 | Correction method, correction apparatus, and inspection apparatus | Tsunehito KOHYAMA, Haruhiko Kusunose, Hiroki MIYAI, Itaru Matsugu | 2020-07-07 |